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MEMS micro stick-slip, adhesion and control

Microbeam restoring force will transition to the A point component, out of the capillary force, and fully release; the B point, the capillary force increased rapidly, so that the occurrence of component and substrate adhesion. Therefore, the equilibrium point B is to control the adhesion behavior of micro components key positions. If the micro-beam. The distance between the base so that the deformation is controlled by micro beam B positions prior to the point, the micro-component does not occur due to adhesion caused by capillary force. In order to prevent the adhesion of micro-components, the structure is a typical micro-beam - make a certain height between the base of the hill,ugg milano, close contact between the two restrictions that limit the maximum deformation of micro beams. The design can be slightly raised height of the deformation calculated point B,air jordan shoes cheap, that is the end of the gap with less micro-micro-Liang Yiji the maximum beam deflection, h0 = h-YB (7) In addition to the anti-adhesion mechanism design rules, adhesion behavior and components with the substrate surface roughness, surface energy, the droplets and the droplet size of the location and other factors are also closely related. 3 Conclusion In this paper, adhesive contact model of the micro stick-slip behavior, the number of proposed definition of micro stick-slip, studies show that the micro stick-slip is to contact the surface properties, morphology parameters and the contact force and the result of such factors. Meanwhile, the study of the surface topography parameters of stick-slip behavior, the results showed that the rough surface is the peak wavelength of the rational design of effective measures to control the stick-slip, caused by micro-component adhesive contact is the main reason for failure of adhesion. Laplace equation combined with micro-deformation analysis of structures under the action of the capillary component of the adhesion behavior of the microcantilever and found the existence of deformation and instability of the two critical points,ed hardy clothing, which made the micro-structure of the basis for the structural design of anti-adhesion. References: [1] BhushanB. HandbookofMicro / Nanotribolog): M]. BocaRaton: CRCPressLLC, 1999. [2] HolscherH, SchwarzUD, Zworner0, eta1. Consequencesofthestick-slipmovementforthescanningforcemicroscopeimagingofgraphitelJJ. PhysicalReviewB, 1998,57 (4) :2477-2481. [3j Wen, nano tribology [M]. Beijing: Tsinghua University Press, 1998. [4] ZhangXiangjun, MengYonggang, WenShizhu. Nano/mi-crotribologystick- �� slipnumberunderanatomicforcemicro-�� scopeanditscharacteristicsJ]. TribologyLetters, 2003,15 (4) :407-1414. [5] Zhao Yapu, Wang Lisen, Sun Kehao. Tabor number of microscale adhesive numbers and elastic adhesive contact theory [J]. Mechanics ,2001,44:436-442. [6] Zhang Xiangjun, Meng Yonggang, Wen cast. MEMS in the number of solid mechanics problems [J]. Mechanics and Practice, 2003,25 (2) :7-11. [7] DingJianning, MengYonggang, WenShizhu. Studyonthedesignofanti-stickingstructuresinMEMSunderdifferentforces [A]. In: 3rdInternationalmposiumonTribology [CJ. Beijing ,2000.436-442. [8] MastrangeloCH. Adhesion-relatedfailuremechanismsinmicromechanicaldevice [J]. TribologyLetters, 1997,3 (3) :223-238. [9] Raccurt0, TardlfF, AmaudF, eta1. InfluenceofliquidsurfacetensiononstictionofSOlMEMS ��J]. Micromechan-icsMicroengineering,stivali ugg, 2004,14:1083 a lO9O.

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