PUMA shoes On Sale Three-dimensional micro-fabrica

Three-dimensional micro-fabrication technology of new technology-DEM

Not been reported. Figure 6 is a PMMA plastic molding process to obtain electron micrographs of the microstructure, microstructure height of 90m, width is 30 ~ ~ m. \Field 6 PMMA obtained by plastic molding process electron micrographs of the microstructure of the preliminary study by DEM Technology,[link widoczny dla zalogowanych], and now has received a number of high aspect ratio micro-structure of metal and plastic, but the overall quality should be improved. The current problems to be solved are: (1) electroforming process, the silicon semiconductor, conductivity itself is not high, although the chosen resistivity silicon and silicon on the back of sputtering a layer of metal, but the resistivity is still high compared with the metal, resulting in difficulties in micro-electroforming; (2) deep, deep grooves in the metal ion can not be consumed quickly added, making a metal micro-electroforming structures produce more porous, mold in the molding process is easy to produce fracture. 3DEM technology industry prospects in recent years,[link widoczny dla zalogowanych], from a global point of view, micro electromechanical system and its fast industrial development, applications from the automotive, medical field gradually to the communications, mechanical engineering and process automation expansion. According to foreign analysis shows that by 2002, micro system technology products output value will reach 38.49 billion U.S. dollars. Large market is likely to become a new economic growth point. Research from a technical point of view, our level of technology in this field gap with the world is not large, but industry is still zero. Therefore, our MEMS technology to speed up the industrialization of products is imminent. The current technology of MEMS processing technology products are mainly two: silicon micromachining technology and LIGA technology. But the two large-scale processing technology for micro-system technology in the manufacture of products, there is a certain difficulty. The high cost of silicon micromachining technology, and only for silicon, LIGA technology, while processing a wide range of materials,[link widoczny dla zalogowanych], high aspect ratio are superior to other processing techniques, but LIGA technology in the industrialization process are extremely limited equipment. DEM technology and silicon micromachining technology compared to the processing of a wide range of materials, processing of silicon material can also be processed non-silicon materials + including metals, plastics, ceramics, processing depth and aspect ratio and other performance indicators and silicon micromachining technology the same, but the price of its plastic products only silicon micromachining technology, 1 / 100. Compared with the LIGA technology DEM technique can process the same material with the LIGA technology, although its processing and the aspect ratio is less than LIGA technology, but most of the MEMS product does not require such a high aspect ratio and thickness, and performance close to the premise, DEM technology industry has a very strong advantages: low cost,[link widoczny dla zalogowanych], short processing cycle, easy to operate, better compatibility with microelectronics technology. Therefore, DEM technology in industrialization process can replace most of LIGA MEMS technology products. DEM processing technology industry in China will be the industrialization of MEMS play an active role in promoting. 4 Conclusion The preliminary study by DEM Technology, has used the technology to produce micro-replication mold molded plastic out of the high aspect ratio micro-structure. Prove that the technology is feasible process route. DEM technique takes advantage of bulk silicon micromachining technology and the advantages of LIGA technology to solve the bulk silicon micromachining technology can only process the limitations of silicon, compared with the LIGA technology, the technology without expensive synchrotron radiation light source and special x-ray mask. The processing period is short, low cost, operability, and better compatibility with microelectronics technology. Successful development of the technology, micro-electromechanical systems to our country since the industrialization of a good boost. References: 1] Zhang, Hao Yilong, and other electronic Technology Review. 1999 (4): 2l2Jillle ~ H, SensorsandActuatorsA1995, 46 ~ 47: l [3] Li Zhijian. Electronic Science and Technology, 1997 (1): 2 【4JAbraliamM, etalMicroelEng. 1998,41142:47 [5] BeekerEW. etaI. MicroelectEng, 1986.4:35 [6] Ehrfe / dW, eta】 RadiatPhysChem. , 1995,[link widoczny dla zalogowanych],45:349 [7] peptone Di, Zhao Xu high-tech communications. 1996.6 (9): 60 [8] Chen Di, Zhang Dacheng, Ding Guifu micromachining technology. 1998. (4): 1 [9] Bhardwai 』K, AshrafHProceedingsofsP Eph. 1996.2639:224 I10JMSTNews, 1998 (3): 37

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