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ugg boots günstig Capacitance micrometer nanomete |
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Nano Micro System capacitance sensor
Baseline method Diameter (mm) (nm) (/ an) (mV) V a P (mV) fit linear fit linearity 10.960 ~ 44169 ≤ 40.416% 0.59% l Hope for a stumble Time (h) Figure 5 using the money to do a temperature sensor on the instrument zero drift curve of Figure 1 shows the use of nano-capacitive probe instrumentation indicators. And the temperature of the instrument zero drift test done, the results shown in Figure 5. This test is relatively stable at room temperature and other conditions under the circumstances, the maximum drift of only 96nm. In addition, improved nano-JDC-type capacitance sensor wiring thanks to a special double-shielded cable capacitance connection with the special method, which basically eliminated the distributed capacitance sensor lead. Technical indicators in the instrument, the dynamic frequency response of up to 0 ~ 4kHz, improved full-scale meter linearity better than 0.5%, shows the minimum displacement to 0.01/zm (corresponding analog voltage output ± 5V). Table 1 and Figure 5 shows the relevant data, according to the above principle circuit technology equipment was substantially improved to enhance accuracy in primary data while other have good performance. Obviously, as the nano-scale testing of the molding products, JDC capacitance sensor of the experimental technology indicators have been close to or reach the level of similar foreign products. The instrument can be widely used in high accuracy static and dynamic displacement measurement and nano-positioning. The current prototype has been successfully used nano Tsinghua piezoelectric measurement precision,[link widoczny dla zalogowanych], and achieved good results. * 18 * With capacitance micrometer technology continues to evolve and continuously improve the instruments, nano-level capacitance sensor will have a more broad application prospects. References l1JD. Marioli, eta1. , Highresolutionmeasurement0fcapacitivetrans-ducersusingaresonancedetectiontechnique. Proc. Int. conf. , IMEKO (Turin) pp. 603-607,[link widoczny dla zalogowanych],1993 l2JKi-HoHan,[link widoczny dla zalogowanych], Young-HoCho, Sel ~ bNancedhigh-resolutioncapacitivemicroaccelerometersusingbranchedfingerelectrodeswithhi 【gh-awl-plitudesensevoltage, 2002l3JF. C & stelli, theelectrolyticcapacitivedisplacementtransducerfornano-technologies. 2000l4JSumantFanganathan, MichaelInerfield, ShUVORoy, StevenL. Garverick,[link widoczny dla zalogowanych], Sub-FemtofaradCapacitiveSensingforMicrofabricatedTransducersUsingCorrelatedDoubleSamplingandDeltaModula-tion, IEEETransactionsoncircuitsandsystems-II: analoganddigi-talsignalprocessing, VOL, 47, NO. 11, N0v = EMBER2000 [5] Li Hongmin, small ultra-high precision, wideband sound of capacitance sensor [MA thesis], Tianjin University of Precision Instruments and Optoelectronics Engineering, 1999l6JXiujunLi, GerardC. M. Meijer,[link widoczny dla zalogowanych], EliminationofShuntingConduc-tanceEffectsinaLow-CostCapacitive-SensorInterface, IEEETransactionsoninstrumentationandmeasurement, V0L. 49, N0.3JUNE2000 [7] Huang Hui Ju. Capacitance sensor and intelligent of dynamic testing [Master Thesis], Tianjin University, College of Precision Instrument and Optoelectronics Engineering, 1988 salt banana Q:!!
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